Design, Simulation and Analysis of MEMS Perforated RF Switch with Platinum
A new model of RF switch was designed using MEMS technology with a cantilever structure which is giving high sensitivity. The materials having low spring constant have been taken and will be examined in COMSOL by identifying the relation between Eigen frequency and displacement.The Proposed structure will be examined with different materials with different thickness(2µm,2.2µm,2.4µm,2.6µm,2.8µm,3µm).The maximum displacementand the minimum displacement for a Eigen frequency will be taken for the platinum materialwithanexamined beam thickness for which highest displacement occurs. And thebeam structure will be tested with perforations and without perforations. It should get a high sensitivity of 6.75*10-4 For the proposed thickness of 2µm The graph for Eigen frequency and displacement have been plotted and verified the values.