Design and Model Analysis of MEMS Respiratory Sensor

Abstract

In this paper a MEMS based pressure sensor is proposed for detection of respiratory rate of human being. The difference in respiratory rates of male to female is compared and analysed that the probability of disease rate in male is more when compared to female. The maximum and minimum values of inhalation force in male is 9.80X10-7Newtonsand the minimum value is 7.27 X10-7Newtons. The maximum and minimum values of inhalation force in female is 8.21X10-7Newtons and the minimum value is 7.08 X10-7Newtons. The maximum and minimum values of exhalation force in male is 6.05X10-6Newtons and the minimum value is 1.93 X10-6Newtons. The maximum and minimum values of exhalation force in female is 4.02X10-6Newtons and the minimum value is 8.66 X10-7Newtons. The proposed resonator is designed with Sio2-poly crystalline Quartz. The material and dimension optimization has been done and selected the structure. The Eigen frequency and displacement analysis has been done and sensitivity is calculated and itsits value is 4.399X10-4. With respect to force the variation in capacitance is calculated. The maximum value of capacitance is 2.17-38X10-38 for male during inhalation and minimum value is for female during inhalation.